Range

X

direction  

30mm

Z

direction

±500μm

Resolution

X

direction  

0.0016μm/±50μm -0.016μm/±500μm

Driver

Straightness

1μm/30mm

A

n

a

l

y

s

i

s

a

l

g

o

r

i

t

h

m

Corresponding Standard

JIS-82、JIS-87、JIS-94、JIS-01、JIS-13、ISO-84、ISO-97、DIN-90、ASME-95、GB-14

P

a

r

ame

t

e

r

s

Roughness

profile

Ra75、Rq、Rp、Rv、Rc、Rt、S、R3z、PPI、Ra、Rsk、Rku、Ry、Sm、RΔa、RΔq、Rz、Pc、Rλa、Rλq、lr、RSm、Rz94、RPc、RS、Rz.I、Rpm、HSC

Waviness

profile

WCA、WCC-q、WCC-p、WCC-v、WCC-m、WCC-Sm、WCA、WC-q、WC-p、WC-v、WCM、WC-Sm、WC-t、Wa、Wq、Wsk、Wku、Wp、Wv、Wz、Wc、Wt、WSm、WΔq、WPc

Primary profile

Rsk、Rku、Rmax、Sm、Δa、Δq、Rz、λa、λq、lr、TILT A、AVH、Hmax、Hmin、AREA、Rz.J、Pa、Pq、Psk、Pku、Pp、Pv、Pc.I、Pt、PSm、PΔq、PPc、Pc

Abbott curve

Rk、Rpk、Rvk、Mr1、Mr2、V0、K、A1、A2

Motif

NCRX、AR、R、Rx、NR、CPM、SR、SAR、AW、W、Wx、Wte、NW、SW、SAW、Rke、Rpke、Rvke、Mr1、Mr2、V0、K

Evaluation curve

Roughness profile、Waviness profile、Primary profile、Abbott curve、Motif

Characteristic curve

Abbott curve (Rmr(c)、Rmr2(c)、Rδc(c)、tp(c)、tp2(c)、Htp(c))、Amplitude frequency analysis curve、amplitude distribution curve

Form remove

global, first half, second half, center, 2 points, curve

Filter type

Gaussian、FFT、PC、DP、2RC

Filter

wave

length

λs

0、2.5、8、25μm              

λc

0.08、0.25、0.8、2.5、8mm

λf

0.8、2.5、8、25mm

Evaluation length

Sampling length × number of samples (sampling length has standard mode and custom mode)

Measurement speed

0.05mm/s、0.10mm/s、0.50mm/s、1.00mm/s、2.00mm/s

Return speed

0.05mm/s、0.10mm/s、0.50mm/s、1.00mm/s、2.00mm/s

S

E

N

S

O

r

Mode

Standard universal type

Sensor mode

Differential inductance

Range

±500μm

Stylus

5μmR diamond 90°

Contact Force

Of the Stylus

7.5mN（adjustable）

O

P

E

R

A

T

O

r

Display part

10-inch color IPS touch screen

Data output

PDF/WIFI printing

Corresponding language

Chinese/English

Size and quality

Power supply

AC220V±10%      Built-in rechargeable battery (AC adapter charging) 3 hours charging time

Power consumption

About 30VA

Quality

Dry weight 3Kg     10Kg package included

Size setting

Actuator 350（L）×116（W）×146（H）